Products&Services
Adopting plasma and electric heating combustion methods, internal spray water/liquid distribution circulation, liquid composition monitoring, and automatic water and liquid replenishment
Special gas cabinets (cylinder cabinets), cylinder racks, proportioning cabinets, etc.: supply proportioning systems for flammable, explosive, corrosive, high-purity special gases in the semiconductor manufacturing industry.
The exhaust gas treatment of LPCVD, PECVD, etching, etc. adopts electric heating/gas combustion method, internal spray water/liquid distribution circulation, liquid composition monitoring, and automatic water and liquid replenishment
Applied in the semiconductor industry LED, commonly used in MOCVD, HVPE (GaN process) waste gas treatment, multi-stage spraying, making easily soluble in water or preparing solutions to react and generate deposited substances, in order to achieve the recovery of toxic and corrosive gases, and safe emission of standard gases
"Pyrolysis"+"decomposition" method, energy-saving and efficient treatment of waste gas from solar cell PECVD and other equipment. SiH4 is subjected to high-temperature pyrolysis, and NH3 is directly decomposed without the need for ammonia treatment or combustion.
Special gas cabinets (cylinder cabinets), cylinder racks, proportioning cabinets, etc.: supply proportioning systems for flammable, explosive, corrosive, high-purity special gases in the semiconductor manufacturing industry.
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