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Product performance:

◆ Internal heating, multi sided heating, graphite/tungsten molybdenum/RF heating, high temperature uniformity

◆ High vacuum degree (10-4Pa~0.5/10MPa), excellent pressure rise rate (leakage rate)

◆ Full parameter control of temperature, rapid cooling, vacuum, pressure, atmosphere, etc

◆ Process temperature: 1300 ℃/1600 ℃/2400 ℃ or higher

◆ Process pressure: vacuum/room temperature/positive pressure/high pressure (up to 10MPa)

◆ R&D type: 5-10kg/furnace, production type: 100kg/furnace, 300kg/furnace


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