Performance:
◆Hot wall dual chamber/halogen tungsten lamp heating/induction heating
◆Structural method: horizontal/vertical
◆Temperature:200~1200℃/
Supporting process:
◆Rapid annealing, alloying(RTA/RTP)
◆Rapid oxidation and nitriding(RTO/RTN)
◆Rapid Vapor Deposition (RTCVD), etc
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