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Meets 4-12 inch wafer process, universal type~1300 ℃/high temperature type~1350 ℃/fast rise and fall temperature type water-cooled type
High temperature heating element, fast temperature rise and fall heating furnace body
High temperature heating element, fast temperature rise and fall heating furnace body
High temperature heating element, fast temperature rise and fall heating furnace body
The high-quality heating furnace body of the entire series of oxidation/diffusion furnaces, LPCVD and other equipment meets the 4 ", 6", 8 ", 12" wafer manufacturing processes, with leading technology and professional manufacturing. The heating furnace body manufactured with more than 20 years of proprietary technology has a wider process temperature range, higher precision and stability in the constant temperature zone, and a longer service life.
The high-quality heating furnace body of the entire series of oxidation/diffusion furnaces, LPCVD and other equipment meets the 4 ", 6", 8 ", 12" wafer manufacturing processes, with leading technology and professional manufacturing. The heating furnace body manufactured with more than 20 years of proprietary technology has a wider process temperature range, higher precision and stability in the constant temperature zone, and a longer service life.
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