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Combustion (electric)+wet flue gas treatment machine series

Wet process+combustion waste gas treatment

Product performance:

◆ Waste gas treatment for LPCVD, PECVD, etching, etc

◆ Adopting electric heating/gas combustion method, internal spray water/liquid distribution circulation, liquid composition monitoring, and automatic water and liquid replenishment

◆ Processing capacity, research type: 100SLM, production type: 400/600/1000/1500SLM


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