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Wet exhaust gas treatment machine series

Wet flue gas treatment

Product performance:

◆ Applied in the semiconductor industry LED, mostly used for waste gas treatment in MOCVD and HVPE (GaN process)

◆ Multi stage spraying, which generates substances that are easily soluble in water or react with configured solutions to form sediment, in order to achieve the recovery of toxic and corrosive gases and the safe discharge of compliant gases

◆ Processing capacity, research type: 50SLM, production type: 400-1500SLM


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