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Equipment and Factory Production Automation _ Industry 4.0

System Introduction:

◆ Fully automated production equipment

◆ Automatic loading and unloading of materials

◆ Unmanned material handling, automatic conveyor belt transmission

◆ Complete factory MES system integration, standard communication system, compliant with SECS II/HSMS/GEM and other standards

System application:

◆ Automated production line for semiconductor 4-8-inch horizontal oxidation diffusion and LPCVD equipment

◆ Equipment automation production line for functional materials/magnetic materials

◆ Automated production line for solar cell equipment

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